KLA-Tencor

3.4178310046557 (1503)
Posted by motoman 03/08/2009 @ 10:07

Tags : kla-tencor, equipment, semi conductors, technology

News headlines
KLA-Tencor and TEL Introduce AcuShape - Trading Markets (press release)
Developed as part of a cooperative agreement between KLA-Tencor and Timbre Technologies, Inc., a subsidiary of TEL, this new software package leverages the strength of the two companies to enable metrology engineers in IC fabs to measure the dimensions...
Option Skews - Relatively Heavy Put Activity on Qualcomm ... - Schaeffers Research
Microchip Technology Incorporated (MCHP), Qualcomm Incorporated (QCOM), and KLA-Tencor Corp (KLAC) were among the stocks seeing a bias toward put buying on Tuesday. I singled out the three names above because they all share two common attributes....
Alexander E. Braun, Senior Editor -- Semiconductor International ... - Semiconductor International
(Source: KLA-Tencor) If anyone is optimistic about scatterometry, it is Wayne McMillan, marketing director for films and scatterometry technologies at KLA-Tencor (San Jose). "OCD's being used for shape control development at 45 and 32 nm,...
KLA-Tencor, TEL Introduce Software Tool for Optical CD Measurement ... - Tech-On English
KLA-Tencor Corp and Tokyo Electron Ltd (TEL) have announced AcuShape, a modeling and library-generation package to meet optical critical dimension metrology requirements for the 32nm node and below. The product is developed as part of an agreement...
KLA-Tencor, Tokyo Electron introduce 3D software tool - DigiTimes
KLA-Tencor has introduced a new software tool it has developed with Tokyo Electron. This tool enables metrology engineers in IC fabs to measure the dimensions of 3D logic and memory structures, as well as structures created by the advanced patterning...
KLA-Tencor Corporation - SWOT Analysis - companiesandmarkets.com ... - PR-Inside.com (Pressemitteilung)
This KLA-Tencor Corporation - SWOT Analysis company profile is the essential source for top-level company data and information. The report examines the company's key business structure and operations, history and products, and provides summary analysis...
nuresume Announces Winners of Star Student Contests in Marketing ... - PR-CANADA.net (press release)
Judges from leading companies such as Sun Microsystems, KLA-Tencor, and the San Jose Sharks judged the Technology and Marketing contests. Contestants were limited to students on the Dean's list, in an Honor society, or nominated by faculty,...
KLA Tencor (KLAC) PriceWatch Alert For 5/22/2009 - Calendar Spread ... - Market Intelligence Center
KLA Tencor (NasdaqNM: KLAC) closed yesterday at $25.81. So far the stock has hit a 52-week low of $14.81 and 52-week high of $46.77. The proprietary Key Risk Ranking for KLAC has declined from a 4 KEY Low Relative Risk to a 3 KEY Moderate Relative Risk...
KLA-Tencor Announces Live Webcast of Upcoming Bank of America and ... - TMCnet
--(Business Wire)-- KLA-Tencor Corporation (NASDAQ: KLAC), today announced that the company will provide a live webcast of its presentation at New York's Bank of America and Merrill Lynch US Technology Conference at 1:30 pm EDT on June 4, 2009....
North American chip-gear orders rose 3 pct in April - Reuters
O), the world's biggest, testing tools firm KLA Tencor Corp (KLAC.O), circuitry-etching tools company Lam Research Corp (LRCX.O) and Novellus Systems Inc (NVLS.O), which specializes in preparing the surface of a silicon wafer before circuits are laid...

Mehrdad Nikoonahad

Dr. Mehrdad Nikoonahad is an Iranian-American electrical engineer, innovator and technologist.

He received B.Sc. and Ph.D. degrees in Electronic Engineering from University College London (UCL), England, in 1979 and 1983, respectively. Here he also completed two years of postdoctoral work. His Ph.D. and postdoctoral work were concerned with scanning microscopy and were carried out under the supervision of Sir Eric Ash. Nikoonahad became a Senior Member of the IEEE by nomination in 1989. In 1997 he completed the Executive Program for Growing Companies at the Graduate School of Business of Stanford University.

Nikoonahad is Cofounder and CEO at Solar Notion, Inc.,a privately held company located near San Francisco, California and focused on novel photovoltaic solar technologies.

Prior to this, he provided business and technology consulting services to public and private companies, as well as the legal and venture capital communities. During this time he was also involved with several start-ups in the high technology arena.

Nikoonahad was formerly Vice President of Technology for Strategic Business Development at KLA-Tencor (KT) Corporation focusing on merger and acquisitions (M&A) and investment activity in the areas of equipment for MEMS, optical communication devices, magnetic media inspection and metrology, and for semiconductor manufacturing. He joined Tencor Instruments in Mountain View, California in 1992 when he proposed and helped develop a platform for a high-speed, laser-based, wafer inspection system, which, then for the first time, addressed the inspection needs for 0.25 micrometre process technology in high volume semiconductor production. That platform was subsequently named Advanced Inspection Technology (AIT) and during its peak times generated over $1 billion in revenue. Nikoonahad then managed development groups and extended that capability for smaller silicon geometries, using ultraviolet lasers.

Subsequent to the AIT, he led numerous development teams for inspection and metrology products used in silicon manufacturing. Laser imaging, metals and dielectric thin film metrology, laser and spectral ellipsometry for dielectric film characterization, photothermal ellipsometry for implant measurement, chemical-mechanical planarization (CMP) end-point detection, optical CD (OCD), overlay characterization, and micro/macro defect inspection are among some the technologies that Nikoonahad and his teams have developed. He was Vice President of Technology for a new division of KT focused on integrated metrology. He was also an advisor to the KT Venture Fund and a member of the corporate Patent Review Committee. He was the winner of numerous innovation and patent awards while at KT.

Prior to KT he was at Philips Research labs in Briarcliff Manor, New York where he served as Senior Member Technical Staff and led research on acoustic imaging, Doppler flow measurement, and medical ultrasound. Nikoonahad has been principal investigator on a number R&D projects for the US National Aeronautics and Space Administration (NASA) and the National Institutes of Health (NIH).

He has authored or coauthored over 50 scientific papers, including a book chapter and is a named inventor on over 100 US patents and patent applications.

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Rajiv Dutta

Rajiv Dutta is a noted technology manager who has worked at major bioscience, semiconductor, software, and online companies. Dutta worked at Bio-Rad Laboratories from 1988 to 1998, and after a brief tenure at semiconductor equipment manufacturer KLA-Tencor moved to eBay shortly before its IPO as its finance director. He was later promoted to Vice President of Finance and Investor Relations and then to Senior Vice President and Chief Financial Officer. He served as President of Skype, which eBay had acquired in 2005, during 2006, and then moved to serve as president of PayPal, which eBay had acquired in 2002, for nearly two years. He was promoted to executive vice president and elected to the board of directors on January 23, 2008 as he moved to a new post overseeing all of eBay's ecommerce businesses. On January 30, 2009, Elevation Partners designated Rajiv Dutta for election to the Board at Palm Inc., after Donna Dubinsky offered to resign.

Dutta was educated at The Doon School and holds an undergraduate degree in economics from St. Stephen's College of Delhi University and an MBA from the Drucker School of Management of the Claremont Graduate School.

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Mask shop

A mask shop is a factory which manufactures photomasks for use in the semiconductor industry. There are two distinct types found in the trade. Captive mask shops are in-house operations owned by the biggest semiconductor corporations, while merchant mask shops make masks for most of the industry.

Merchant mask shops will produce photomasks for a variety of integrated device manufacturers (IDMs) or optical device companies in addition to providing excess cavity work and re-pellicle for captive mask shops.

This equipment set can produce approximately five 65 nm reticles per day.

Construction costs of a suitable factory, plant and cleanroom will depend on location but can be around $20-30M. CATS (software) licensing up to $1M dependent on formats and threads.

Because of the high costs of setting up such facilities with new equipment, many second-tier fabs and manufacturing concerns are taking to purchasing used equipment to meet their needs. For example the sales price for KLA-Tencor SLF87 from such a used equipment reseller is around 1/10th of the new sales price.

As technology shrinks, the cost to mask shops increase and the product turn around time grow longer as well. The trend in this new decade is for manufacturing to migrate eastwards to reduce cost and lead times. Once technology restrictions in the Wassenaar Arrangement are reduced, high end reticles and integrated circuits will be produced in mainland China rather than Taiwan.

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KLA Tencor

KLA-Tencor Corporation (NASDAQ: KLAC) is a supplier of metrology and inspection tools for integrated circuit (IC) manufacturers. The company has a comprehensive portfolio of products designed to help manufacturers improve yield -- the fraction of chips that function properly.

The fabrication of an IC is accomplished by depositing a series of film layers upon a silicon wafer that act as conductors, semiconductors or insulators. Numerous other process steps create circuit patterns, remove portions of the film layers, and perform other functions such as heat treatment. The role played by KLA-Tencor's products is to monitor the results of these steps to allow the manufacturer to control them. KLA-Tencor’s product portfolio can be broadly categorized into four groups: Defect Inspection, Metrology, Services and Software.

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Overlay Control

Silicon wafers are currently manufactured in a sequence of steps, each stage placing a pattern of material on the wafer; in this way transistors, contacts, etc., all made of different materials, are laid down. In order for the final device to function correctly, these separate patterns must be aligned correctly - for example contacts, lines and transistors must all line up.

Overlay control is the term used to define the control of this pattern-to-pattern alignment. It has always played an important role in semiconductor manufacturing, helping to monitor layer-to-layer alignment on multi-layer device structures. Misalignment of any kind can cause short circuits and connection failures, which in turn impact fab yield and profit margins.

Overlay control has become even more critical now because the combination of increasing pattern density and innovative techniques such as double patterning and 193nm immersion lithography creates a novel set of pattern-based yield challenges at the 45nm technology node and below. This combination causes error budgets to shrink below 30 percent of design rules, where existing overlay metrology solutions cannot meet total measurement uncertainty (TMU) requirements.

Overlay metrology solutions with both higher measurement accuracy/precision and process robustness are key factors when addressing increasingly tighter overlay budgets. Higher order overlay control and in-field metrology using smaller, micro-grating or other novel targets are becoming essential for successful production ramps and higher yields at 45nm and beyond.

Examples of the widely adopted overlay measurement tools worldwide are KLA-Tencor's ARCHER , and the nanometrics CALIPER series, overlay metrology platforms.

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Micropipe

A micropipe is a defect in a single crystal substrate. Today this is of great interest to makers of silicon carbide (SiC) substrates which are used in a variety of industries such as power devices for vehicles and high frequency communication devices.

However, during the production of these materials, the crystal undergoes internal and external stresses causing growth of defects, or dislocations, within the atomic lattice.

A screw dislocation is a common dislocation that transforms successive atomic planes within a crystal lattice into the shape of a helix. Once a screw dislocation propagates through the bulk of a sample during the wafer growth process, a micropipe is formed. The presence of a high density of micropipes within a wafer will result in a loss of yield in the device manufacturing process.

Micropipes and screw dislocations in epitaxial layers are normally derived from the substrates on which the epitaxy is performed. Micropipes are considered to be empty-core screw dislocations with large strain energy (i.e. they have large Burgers vector); they follow the growth direction (c-axis) in silicon carbide boules and substrates propagating into the deposited epitaxial layers.

Factors which influence formation of micropipes (and other defects) are such growth parameters as temperature, supersaturation, vapor phase stoichiometry, impurities and the polarity of the seed surface.

Many laboratories in universities and companies are striving to perfect the micropipe-free substrate. One of the pioneers of the commercialization of SiC materials and devices is Cree Inc. which in May 2007, announced that it had achieved 100-mm (4-inch), Zero-Micropipe, n-type SiC substrates. It is therefore possible to eliminate these defects in large-area wafers as well as smaller fragments and should open up the commercialization of this area of microelectronic devices.

United States Patent 7,201,799, V Velidandla, KLA-Tencor Technologies Corporation (Milpitas, CA), April 10, 2007, System and method for classifying, detecting, and counting micropipes.

Performance Limiting Micropipe Defects in Silicon Carbide Wafers by Philip G. Neudeck and J. Anthony Powell of NASA Lewis Research Center.

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Source : Wikipedia